1. Product Overview
The Quartz Cleaning Boat is a high-purity, corrosion-resistant carrier designed for semiconductor, photovoltaic, and precision electronics industries. It is used to hold wafers or components during wet/dry cleaning, acid etching, or high-temperature processes.

2. Technical Specifications
Parameter    : Details
Material : Fused Quartz (SiO₂ ≥99.99%)
Dimensions : Customizable (Standard: Length 200–500 mm, Width 50–150 mm, Height 20–50 mm)
Max. Temperature : 1,200°C (Continuous Use) / 1,450°C (Short-Term)
Surface Finish : Acid-polished, Ra ≤0.8 μm
Purity : Low metallic impurities (Na, K, Fe, etc. <1 ppm)
Thermal Stability : Coefficient of Thermal Expansion (CTE): 0.55 ×10⁻⁶/°C (20–1,000°C)

3. Key Features
High Chemical Resistance: Resists HF, HCl, HNO₃, and other aggressive chemicals.
Low Thermal Expansion: Minimizes deformation under rapid temperature changes.
Non-Contaminating: Ultra-clean surface prevents particle adhesion.
Custom Design: Slot spacing, depth, and boat geometry tailored to client needs.

4. Applications
Wafer cleaning in wet benches (RCA, SC1/SC2).
Acid bath processes (e.g., BOE etching).
High-temperature annealing/diffusion steps.
CVD/PVD chamber component handling.

5. Quality Assurance
Compliance: Meets SEMI F20/F47 standards.
Testing:
ICP-MS for impurity analysis.
Surface roughness measurement via AFM.
Thermal shock testing (1,000°C ⇄ 25°C, 10 cycles).

6. Packaging & Storage
Individually packed in anti-static, ESD-safe containers.
Store in a dry, dust-free environment (10–30°C).

7. Precautions
Avoid mechanical impact or sudden temperature changes (>10°C/min).
Clean with DI water or ethanol before first use.

8. Contact Information
For customization or technical support, contact:
Email: [luzhenzhu@tuguanshiying.com].